Longer Lifetime
Better Performance
Reduced Cost of Ownership
Welcome to ESCT
ESCT delivers the latest electrostatic chuck (ESC) technology for the semiconductor industry. Our products reduce cost of ownership, with longer ESC lifetime and improved process performance. Our customer support aims for the highest standard of customer satisfaction.
Our ESC’s are used globally in AMAT, Lam, TEL, SPTS, AMEC, Hitachi and other chambers. We support wafer sizes from 100mm to 300mm and have full custom capability.
In collaboration with TEMNEST Inc, ESCT has a network of selected local partners and offers global pricing.
Technology
Opposites attract. That’s how an ESC works.
The ESC holds the wafer in place during many processes used in semicondutor manufacturing, including plasma etch, PVD and HDPCVD.
A high voltage or “chucking voltage” in the ESC creates a holding force between the wafer and the ESC, therefore “chucking” the wafer.
Our ESC’s use the latest advanced materials and designs, and can be repaired to new condition.
Product
We provide new ESC products for chambers from the following OEM’s
AMAT ♦ LAM ♦ TEL ♦ SPTS ♦ AMEC ♦ Hitachi
