AMAT

ESCT provides the following new products for AMAT chambers;

They replace the old OEM ESC designs including;

MxP, MxP+

DPS

Super-e, EMAX

Ultima HDPCVD

Tungsten WEB, WxP

300mm DPS2, Ultima

ESCT

OLD

MxP, MxP+

DPS

Super-e

Ultima

Tungsten

DPS2

ESCT

OLD

MxP, MxP+

MxP, MxP+

DPS

DPS

Super-e, EMAX

Super-e

Ultima HDPCVD

Ultima

Tungsten WEB, WxP

Tungsten

300mm DPS2, Ultima

DPS2

ESCT

OLD

Available in multiple wafer sizes, to replace polyimide, AlN and Al2O3 OEM designs. They deliver many benefits including;

• Extended lifetime, better WIW temperature control
• Reduced particles, no arcing
• Can be recycled > 3 times = better cost of ownership

ESCT supplies new ceramic lift pins for MxP and DPS chambers. 0010-08066, 0010-23716

Please check here to see which original OEM part numbers have been replaced.