PRODUCTS

Amat

ESCT provides the following new products for AMAT chambers;

They replace the old OEM ESC designs including;

MxP, MxP+
DPS
Super-e, EMAX
Ultima HDPCVD
Tungsten WEB, WxP
300mm DPS2, Ultima
ESCT
OLD
MxP, MxP+
DPS
Super-e
Ultima
Tungsten
DPS2

ESCT
OLD
MxP, MxP+
MxP, MxP+
DPS
DPS
Super-e, EMAX
Super-e
Ultima HDPCVD
Ultima
Tungsten WEB, WxP
Tungsten
300mm DPS2, Ultima
DPS2
ESCT
OLD


Available in multiple wafer sizes, to replace polyimide, AlN and Al2O3 OEM designs. They deliver many benefits including;

  • Extended lifetime, better WIW temperature control
  • Reduced particles, no arcing
  • Can be recycled > 3 times = better cost of ownership

 

ESCT supplies new ceramic lift pins for MxP and DPS chambers. 0010-08066, 0010-23716

Please check here to see which original OEM part numbers have been replaced.

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