ESCT provides the following new products for AMAT chambers;
They replace the old OEM ESC designs including;
Available in multiple wafer sizes, to replace polyimide, AlN and Al2O3 OEM designs. They deliver many benefits including;
- Extended lifetime, better WIW temperature control
- Reduced particles, no arcing
- Can be recycled > 3 times = better cost of ownership
ESCT supplies new ceramic lift pins for MxP and DPS chambers. 0010-08066, 0010-23716
Please check here to see which original OEM part numbers have been replaced.