ESCT provides the following new products for LAM chambers;
The ESC for 4520-Excelan has much better backside cooling and no wafer sticking. Better backside He leakrates. Replaces OEM AlN, needs no perimeter lift pins. This means much faster and reliable dechucking, with longer lifetime due to no plate and adhesive. The 9600 style has same electrical characteristics with superior anodisation and lifetime.
They replace the old OEM ESC designs including;
Please check here to see which original OEM part numbers have been replaced.