SPTS, Hitachi, AMEC
ESCT provides the following new products for SPTS chambers;
They replace the old OEM ESC designs including;
RIE
Synapse/APC
ESCT
OLD
RIE
Synapse/APC
ESCT
OLD
RIE
Synapse/APC
RIE
Synapse/APC
Each ESC is available in multiple wafer sizes, and delivers
- Improved Performance
- Reduced Cost of Ownership
Please check here to see which original OEM part numbers have been replaced.