ESCT provides the following new products for TEL chambers;
These replace either polyimide style or OEM ceramic style, with no glue layers and therefore no edge heating as the ESC has more RF hours. ESCT ESC will last longer with better edge temperature control, and is recycled >3 times reducing costs of ownership.
They replace the old OEM ESC designs including;
Please check here to see which original OEM part numbers have been replaced.