Technology

The ESC clamps the wafer to a dielectric ESC chuck surface by electrostatic pressure, or clamping / chucking force.

These ESCT ESC’s use Coulombic monopolar technology.

Some OEM ESC’s are also Coulombic (e.g. polyimide dielectric), other OEM ESC’s are J-R Johnson Rahbeck (e.g. TiO2 conductor) designs.

In all cases, ESCT new ESC’s use the existing OEM cathode and existing OEM power supplies. They are a direct fit replacement for OEM ESC’s.

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