TECHNOLOGY

Coulombic Monopolar

Opposite charges attract. This is the principle of electrostatic pressure.

The ESC dielectric has a monopolar electrode, and yields a chucking pressure or force (P) on the wafer;

P = [ε ] [V Kr / {d + Kr}]

 

where
ε = free space permittivity
V = electrode – substrate voltage
Kr = dielectric constant
d = dielectric thickness

 

Monopolar means the ESC has a single pole, which delivers excellent Rf uniformity and high chucking force

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