TECHNOLOGY

Custom

We can develop application and customer specific ESC if you require.

Recent examples include:

  •   150mm DPS Metal Notch
  •   150mm 4520 Notch
  •   150mm Super-e
  •   100mm PVD Endura
  •   100mm SPTS APC

This can be very useful for customers with new wafers or carriers.

 

Please contact us if you require. You will need to exchange your application, cathode and chamber type, wafer information etc.

 

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