ESC Repair & Refurbishment: Cutting Cost of Ownership
August 21, 2026
How electrostatic chuck repair and refurbishment (L1 and L2) restore as-new clamping and particle performance and cut cost of ownership on legacy fab tools.
Electrostatic Chucks (ESCs) for the Semiconductor Industry, 100-300mm
How electrostatic chuck repair and refurbishment (L1 and L2) restore as-new clamping and particle performance and cut cost of ownership on legacy fab tools.
We offer new ESC’S to replace OEM ESC’s, which saves time and money for wafer fabs, and improves the supply chain.
We offer custom ESC’s for equipment companies to build into their process chambers, and ensure a cost effective ESC roadmap.
In each case, we deliver the latest technologies for materials and ESC fabrication to each customers.
We provide full ESC services using the latest 300mm materials and techniques. OEM customers use our design, fabrication and test capabilities to improve obsolete ESC’s or advance their technology roadmap. With our full in-house R&D capabilities, we design, test and build ESCs to meet customer needs from 100mm to 300mm, all wafer types.
We provide new AMAT equivalent ESCs. Equivalent OEM part numbers are provided below. These ESC’s are supplied in 100mm, 150m and 200mm.
We provide many different LAM equivalent ESCs. All equivalent OEM part numbers are provided along with our capabilty to make these ESCs in 100, 150 and 200mm.
We provide many different TEL equivalent ESCs. All equivalent OEM part numbers are provided along with our capabilty to make these ESCs in 100, 150 and 200mm.
ESCT provides the following new products for SPTS chambers;
They replace the old OEM ESC designs including;
Each ESC is available in multiple wafer sizes, and delivers:
We repair all of our own ESC’s.
We repair OEM ESC’s, TEL 300mm and SPTS ESC’s.
ESC products can be repaired >3 times, returned to as-new condition. This is a guaranteed process and reduces cost of ownership:
Cost of ownership = Purchase Cost / (extended lifetime * repair cycles)
There are 2 levels of repair:
Every repair goes through full final functional test and is returned with warranty, in new condition.
There are many reasons our customers need a new ESC:
Please contact us if you require ESCT and TEMNEST to design you a better ESC.
ESCT Fab Support is a division of ESC Technology, which supplies supporting hardware and services to our growing customer base.
We supply new or 2nd source parts, repair services, technical training and equipment upgrades.
