Coefficient of Thermal Expansion & Wafer Matching in ESCs
October 9, 2026
Why electrostatic chuck CTE and wafer matching matter: alumina, AlN and silicon expansion, differential stress, particles and thermal uniformity.
We repair TEL OEM-supplied 300mm ESCs and our own AMAT 300mm ESCs. Both have been qualified at major production wafer fabs for years, giving customers a high-quality way to reduce ESC cost of ownership.
Why electrostatic chuck CTE and wafer matching matter: alumina, AlN and silicon expansion, differential stress, particles and thermal uniformity.
For TEL OEM 300mm ESC repair, we carry out incoming inspection followed by a detailed repair process flow and a rigorous final test. Every ESC is returned to the customer with a final test data sheet and a 90-day warranty.
There are two 300mm repair products on offer – L1 Surface Re-conditioning and L2 Surface Re-profiling – depending on the condition of the ESC.
Beyond the standard L1/L2 flow, we also repair the following 300mm ESC part numbers.
Don’t see your part number? Get in touch and we’ll confirm repair feasibility.