New 300mm ESC – Ultima HDPCVD
We offer a new ESC TM106112-48594 as a direct replacement for the OEM ESC, to be used in 300mm Ultima HDPCVD systems. This delivers better ESC-to-ESC consistency and lower cost of ownership as we can repair our own ESC to new condition several times.
Built to order using alumina (Al2O3)and coulombic technology, this new ESC delivers reliable repeatable performance while maintaining full compatibility with existing hardware, process kits, and ESC parameters. Customers have already qualified into production with no changes to hardware or setup compared to the OEM ESC.
The TM106112-48594 is manufactured under strict quality assurance protocols, with lifetime tracking to ensure consistency across units. Designed for durability, the ESC can be refurbished multiple times to original specifications, reducing total cost of ownership over time.In addition to new ESC’s, the company also offers repair services for some OEM ESCs, supporting customers in their goals for better operating efficiencies..
