ABOUT ESC TECHNOLOGY

ESC Technology Limited is a registered company in the UK, and is a partnership company with TEMNEST Inc. of Korea. ESC Technology also trades as “ESCT” as a shortname.

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ESC TECHNOLOGY

ABOUT ESCT

ESCT in partnership with TEMNEST provide leading ESC products, with support services to our growing global customer base of OEM’s and Wafer Fabs.

Our focus is to help customers reduce cost of ownership, waste, and downtime.

ESCT Operations include:

  • Quality Management System QMS (open to audit by customers)
  • Health and Safety policy
  • Sustainability policy

Our team has >60 years OEM experience.

SUSTAINABILITY
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ESC TECHNOLOGY

SUSTAINABILITY IS KEY FOR SUCCESS

ESCT complies with all required legislation and operates best practices in all areas.

Goals and Aims

  • Reduce emissions and waste at every opportunity
  • Increased use of best practices wherever we can
  • Improve business practices and processes to the highest possible level
  • Fairness, inclusion for all of our stakeholders.

2021-2026 Action Taken

  • ESC’s are recycled to new condition, multiple times – reduce waste material
  • Ship direct to and from factory – minimise lead time, air miles and emissions
  • Minimum, reuseable packaging. Recycling at all our locations
  • 5% Pre Tax annual profit to charity (USA and Europe - started 12/23)
  • Online meetings and documents – reduce travel and printing
  • Recycling at all our locations. Staff training on sustainability measures

Communication

Regular review sessions with stakeholders, staff training on sustainability impacts.

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Sustainable and ethical business at ESC Technology
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LATEST NEWS

NEWS

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ESC’s for Ultima, Ultima+ and DPS2 ready for shipment

Our ESC’s are used by global fabs in AMAT chambers, including 200 and 300mm Ultima HDPCVD and DPS2 Etch.
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Latest Super-E ESC – TM105708VN-CP – replaces AMAT 0040-39990 and TM105708VN

The latest materials technology is used to create our latest Super-E ESC, which replaces OEM part numbers 0040-39990, 0010-05966. TM105708VN-CP uses our latest Super Dense CP alumina as the dielectric, a material developed and used in advanced 300mm ESCs.
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Reducing Chamber Maintenance with AMAT WxZ Tungsten Etchback ESC

The improved performance is attributed to its aluminium oxide (Al₂O₃) construction and non-stick surface, which reduce particle generation and enhance process stability.
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Further Operations Expansion In USA

ESC Technology is continuing to grow globally and we are delighted to Welcome Greg Sajbel onto the team. Greg is an industry veteran with many years experience in front-end equipment and business development.
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Increased Throughput, Lam Exelan 4520 ESC – TM207108

The latest 300mm ESC technology is used to create improved ESC’s at 200mm, 150mm and even 100mm by ESCT.
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New 300mm ESC – Ultima HDPCVD

New 300mm ESC – Ultima HDPCVD We offer a new ESC TM106112-48594 as a direct replacement for the OEM ESC, to be used in 300mm Ultima HDPCVD systems.
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Comprehensive support for AMAT DPS Metal Etch

Comprehensive support for AMAT DPS Metal Etch is further developed by ESC Technology The DTCU (Dome Temperature Control Unit) is an essential assembly on top of the etch chamber, and has been developed over many years with different versions.
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Business Expansion in USA

Since 2020, ESC Technology Ltd has used distribution companies to support to our ESC customers in the United States. Effective April 1st, 2025, we will operate a direct supply and support model through our USA subsidiary, ESC Technology Inc.
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ESCT Fab Support Website Goes Live

We have created a new website to help support our growing customer base with more of their in-Fab needs.
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ESCT Training Courses Now Available

ESCT has a number of new training courses that are being deilivered at our customer sites. We have just added – Endura – System & PVD Process Training, This has been a huge success from the feedback recieved.
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ESCT Makes Charitable Donation

As part of our ongoing Ethical Business policy, ESCT has made a donation from 2023 post-tax profit to our chosen charity. MND Scotland supports families at home with MND patient care, and donates to MND medical research.
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JMT BECOMES APPROVED ESCT RESELLER

JMT joins the ESCT reseller team. For strategic Japan end user market, JMT is now the supplier for ESC’s supported by ESCT and TEMNEST.
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LATEST ARTICLES

INSIGHTS

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Coefficient of Thermal Expansion & Wafer Matching in ESCs

Why electrostatic chuck CTE and wafer matching matter: alumina, AlN and silicon expansion, differential stress, particles and thermal uniformity.
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Volume Resistivity & the ESC Clamping Regime

How electrostatic chuck volume resistivity sets the Coulombic or Johnsen-Rahbek clamping regime, the resistivity bands, and why it matters in the fab.
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Ceramic vs Polymer ESCs

Ceramic vs polymer electrostatic chucks compared on plasma resistance, thermal tolerance and durability, and where each type is actually used.
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Titania-Doped Alumina ESCs: Tuning Resistivity

How titania-doped alumina tunes electrostatic chuck resistivity into the Johnsen-Rahbek band for higher clamping force per volt, and the trade-offs involved.
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Aluminum Nitride (AlN) ESCs: Properties & Use

Aluminum nitride (AlN) electrostatic chucks: high thermal conductivity, CTE close to silicon, JR clamping and where the cost premium over alumina pays off.
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Alumina (Al2O3) ESCs: Properties & Use

Alumina (Al2O3) electrostatic chucks explained: resistivity, thermal conductivity, CTE and dielectric strength, and where alumina is the right ESC dielectric.
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ESC Dielectric Materials: Alumina vs Aluminum Nitride

Compare electrostatic chuck dielectric materials – alumina vs aluminum nitride – across volume resistivity, thermal conductivity, CTE and plasma resistance.
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ESC Reconditioning Warranty & Final Functional Test

What a proper ESC reconditioning warranty and final functional test should cover, from clamp force and helium leak-back to particle and thermal mapping.
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ESC Failure Modes & Diagnosis

The main electrostatic chuck failure modes and how to diagnose each at the tool: symptom, likely cause, diagnostic check and the typical repair remedy.
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How to Extend ESC Lifetime

Operational practices that extend electrostatic chuck lifetime: dechuck discipline, helium leak monitoring, particle control and proactive recondition.
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Inside the ESC Refurbishment Process, Step by Step

Inside the electrostatic chuck refurbishment process: inbound inspection, strip, dielectric and electrode rework, reassembly and full functional test.
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Repair or Replace Your ESC? A Decision Framework

A practical framework for deciding whether to repair or replace a worn electrostatic chuck, covering condition, cost, lead time and obsolescence.
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ESC TECHNOLOGY

PARTNERS

JM Technology Inc (JMT) logo
SEUL logo
TEMNEST logo

OSAKA, JAPAN

SINGAPORE

SOUTH KOREA

HIGH PERFORMANCE. LOW COST.
ZERO COMPROMISE.