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AMAT ESC Replacements and Repairs

ESC Technology builds direct-equivalent ESCs for AMAT process chambers, and repairs worn ESCs back to original specification. The range covers 100mm, 150mm and 200mm wafers across the MxP, DPS, Ultima, Super-E, EMAX, MKII, WEB/TEB, Endura and pedestal families. Every part is cross-referenced to the Applied Materials number it replaces, so you can search by the number already in your spares system.

AMAT chambers and platforms we cover

The table lists every AMAT platform we currently build or repair an ESC for, with the wafer sizes available and the Applied Materials numbers each one replaces. Sizes are separate parts with separate pages, because the same chamber family usually carries a different OEM number at each wafer size.

If your chamber is not listed, ask anyway. We add platforms when there is real demand, and several of the pages above began as a single customer enquiry.

How AMAT part numbers map to our ESCs

Most Applied Materials numbers on these parts start with 0010, 0040, 0041, 0090 or 0190. The number identifies a revision as well as a part. Applied Materials revises numbers over the life of a platform, so one physical ESC can appear under several numbers across different years.

We handle this in two ways. First, each product page lists every OEM number we know for that part, so a legacy number and a current number both lead to the same equivalent. Second, we check the number against the wafer size before we quote. A 200mm number and a 150mm number for the same chamber family are different parts, and they are not interchangeable.

If the number on your plate is worn or missing, send the platform name, the wafer size and a photo of the clamping surface. That is usually enough for us to identify the part.

Replace or repair

Every ESC we build is designed to be repaired rather than scrapped. There are two routes.

• Level 1 is a surface recondition. It restores the mesa field and the seal band, and it is indicatively around 25% of the price of a new ESC.
• Level 2 is a full strip and rebuild to the aluminium frame, indicatively around 70% of new.

An ESC can typically be returned to original specification up to three times. CP (Ceramic Plate) builds are Level 2 only, because the repair route on those parts is to remove the whole ceramic plate and reattach it. Repair is not limited to 200mm and below: we also run a 300mm repair service, which covers our own AMAT 300mm ESCs. See the 300mm ESC repairs page for that process.

Why fabs second-source AMAT ESCs

Much 150mm and 200mm capacity runs power devices, analogue, MEMS, sensors and compound semiconductors. Those tools are still productive, but they are no longer the OEM priority. Spares get slower and dearer, and some parts move to made-to-order.

A direct equivalent changes that in three ways. The part fits the existing cathode, so nothing in the chamber has to change. The same part can be reconditioned repeatedly instead of scrapped, which is where most of the lifetime saving comes from. And supply is not tied to the OEM roadmap for a platform the OEM has moved on from.

What we need to quote

• The Applied Materials part number, or the platform and chamber name.
• The wafer size: 100mm, 150mm, 200mm or 300mm.
• Whether you need a replacement ESC, a repair, or a price for both.
• Quantity, and whether you hold a spare in rotation.
• For repairs, photographs of the clamping surface and a note of the fault, for example wafer sticking, particle excursions or loss of temperature uniformity.

Other OEM platforms we support

We build direct-equivalent ESCs for other OEM platforms as well: LAM ESC replacements, TEL ESC replacements, SPTS ESC replacements.

Frequently asked questions

Are these original Applied Materials parts?

No. They are direct equivalents designed and built independently by ESC Technology to fit and function in place of the original. ESC Technology is not affiliated with, authorised by, or endorsed by Applied Materials, Inc.

Will an equivalent ESC fit without modifying the chamber?

Yes. Each ESC mounts on the existing cathode and uses the same power supply and helium connections as the original, so it is a drop-in replacement. The surrounding hardware does not need requalification.

My AMAT part number is not in your table. Can you still help?

Usually yes. Applied Materials revises part numbers over time, so your number may be another revision of a part we already build. Send us the number with the platform name and wafer size and we will check it against our cross-reference.

Do you repair AMAT ESCs, or only sell replacements?

Both. Level 1 is a surface recondition at indicatively around 25% of the price of a new ESC. Level 2 is a full strip and rebuild to the frame at around 70%. An ESC can typically be returned to specification up to three times. CP (Ceramic Plate) builds are Level 2 only.

Which wafer sizes do you support for AMAT chambers?

100mm, 150mm and 200mm for replacement ESCs, with the exact sizes shown per platform in the table above. For 300mm we offer a repair service rather than replacement parts.

ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by Applied Materials, Inc. All products described on this page are direct equivalents only. They are not OEM parts. Repair percentages are indicative and are quoted per ESC after inspection.