News

News, guides and technical insights on electrostatic chucks (ESCs), ESC repair and semiconductor fab equipment from the ESC Technology team.

LATEST NEWS

Coefficient of Thermal Expansion & Wafer Matching in ESCs

October 9, 2026

Why electrostatic chuck CTE and wafer matching matter: alumina, AlN and silicon expansion, differential stress, particles and thermal uniformity.

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Electrostatic Chucks (ESCs): The Complete Engineering Guide

What an electrostatic chuck (ESC) is, how Coulombic and Johnsen–Rahbek clamping work, ESC materials, wafer sizes, helium backside cooling, dechucking, and repair vs replacement.

ESC’s for Ultima, Ultima+ and DPS2 ready for shipment

Our ESC’s are used by global fabs in AMAT chambers, including 200 and 300mm Ultima HDPCVD and DPS2 Etch.

Latest Super-E ESC – TM105708VN-CP – replaces AMAT 0040-39990 and TM105708VN

The latest materials technology is used to create our latest Super-E ESC, which replaces OEM part numbers 0040-39990, 0010-05966. TM105708VN-CP uses our latest Super Dense CP alumina as the dielectric, a material developed and used in advanced 300mm ESCs.

Reducing Chamber Maintenance with AMAT WxZ Tungsten Etchback ESC

The improved performance is attributed to its aluminium oxide (Al₂O₃) construction and non-stick surface, which reduce particle generation and enhance process stability.

Further Operations Expansion In USA

ESC Technology is continuing to grow globally and we are delighted to Welcome Greg Sajbel onto the team. Greg is an industry veteran with many years experience in front-end equipment and business development.

Increased Throughput, Lam Exelan 4520 ESC – TM207108

The latest 300mm ESC technology is used to create improved ESC’s at 200mm, 150mm and even 100mm by ESCT.

New 300mm ESC – Ultima HDPCVD

New 300mm ESC – Ultima HDPCVD We offer a new ESC TM106112-48594 as a direct replacement for the OEM ESC, to be used in 300mm Ultima HDPCVD systems.

Comprehensive support for AMAT DPS Metal Etch

Comprehensive support for AMAT DPS Metal Etch is further developed by ESC Technology The DTCU (Dome Temperature Control Unit) is an essential assembly on top of the etch chamber, and has been developed over many years with different versions.

Business Expansion in USA

Since 2020, ESC Technology Ltd has used distribution companies to support to our ESC customers in the United States. Effective April 1st, 2025, we will operate a direct supply and support model through our USA subsidiary, ESC Technology Inc.

ESCT Fab Support Website Goes Live

We have created a new website to help support our growing customer base with more of their in-Fab needs.

ESCT Training Courses Now Available

ESCT has a number of new training courses that are being deilivered at our customer sites. We have just added – Endura – System & PVD Process Training, This has been a huge success from the feedback recieved.