Comprehensive support for AMAT DPS Metal Etch is further developed by ESC Technology
The DTCU (Dome Temperature Control Unit) is an essential assembly on top of the etch chamber, and has been developed over many years with different versions.
R1 ETCU – now obsolete from OEM, is fully refurbished and repaired by ESCT. Full incoming inspection with report is completed, then tested on Centura with DPS chamber for final test. Missing or damaged parts are replaced, and a warranty supplied.
E-DTCU – this version is used for DPS+ metal etch chambers, and is supplied new for upgrade to chamber or DTCU.
OEM part numbers supported include 0010-30125 & 0010-06121
See attached examples of refurbishment and 2nd source new