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Pedestal ESC for 200mm (8-inch) Wafer Processing
The 200mm Pedestal ESC in its 200mm configuration is a direct equivalent for the Applied Materials 200mm pedestal, engineered by ESC Technology to clamp and temperature-control 8-inch wafers during plasma processing. It mounts on the same cathode, power supply and gas connections as the original — a true drop-in with no chamber modification — and, unlike the OEM part, it is fully repairable.
Why a 200mm Pedestal?
The 200mm pedestal ESC carries the wafer through etch and deposition steps on legacy Applied Materials tools, where consistent clamping and backside-helium cooling keep temperature uniform across the 8-inch wafer. A maintainable equivalent keeps mature-node 200mm capacity supported without a full tool refresh, and can be reconditioned rather than scrapped.
Design & Compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 8-inch wafer, holding tight temperature uniformity through the process. Mechanically and electrically it matches the Applied Materials original, so it installs on the existing cathode with no requalification of the wider tool. Construction options (coated-ceramic and CP / Ceramic Plate) follow the ESC Technology family standard — the denser CP giving higher breakdown voltage and improved thermal control.
Repair & Reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower Cost of Ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 200mm Pedestal equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM Cross-Reference (200mm)
This 200mm Pedestal is a direct equivalent for the Applied Materials 200mm pedestal (OEM references 0021-09989 and 0040-09256). It is a direct equivalent, not an OEM part, and is not affiliated with Applied Materials. Where a published OEM part number applies, it can be confirmed on request against your existing chamber configuration.
Frequently Asked Questions
Is the 200mm Pedestal ESC an original Applied Materials part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the Applied Materials Pedestal ESC. It is not an OEM part and is not affiliated with Applied Materials.
Will it fit my Pedestal chamber without modification?
Yes. The 200mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Which OEM part number does the 200mm Pedestal replace?
The 200mm Pedestal is supplied as a direct equivalent for the Applied Materials 200mm pedestal. The applicable OEM reference is 0021-09989 and 0040-09256; our team can confirm the correct equivalent for your configuration on request.
What wafer size and applications does it suit?
It is built for 8-inch (200mm) wafers on 200mm etch and deposition processes across mature-node device production.