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DPS Notch ESC for 150mm (6-inch) Wafer Processing
The DPS Notch ESC in its 150mm configuration is a direct equivalent for the Applied Materials DPS conductor-etch chamber in its notched-wafer layout, engineered by ESC Technology to clamp and temperature-control 6-inch wafers during conductor etch. It mounts on the same cathode, power supply and gas connections as the original — a true drop-in with no chamber modification — and, unlike the OEM part, it is fully repairable.
Why a 150mm DPS Notch?
The notch variant carries the mesa field, seal band and lift-pin pattern aligned to a notched 6-inch wafer, so alignment and backside sealing stay correct for fabs running notched substrates on DPS lines. It delivers consistent electrostatic clamping and helium-cooled temperature control, and because it is a maintainable part rather than a consumable it simplifies spares planning for 6-inch DPS capacity the OEM no longer prioritises.
Design & Compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 6-inch notched wafer, holding tight temperature uniformity through the etch. Mechanically and electrically it matches the Applied Materials original, so it installs on the existing cathode with no requalification of the wider tool. Construction options (coated-ceramic and CP / Ceramic Plate) follow the ESC Technology family standard — the denser CP giving higher breakdown voltage and improved thermal control.
Repair & Reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower Cost of Ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 150mm DPS Notch equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM Cross-Reference (150mm)
This 150mm DPS Notch is a direct equivalent for the Applied Materials DPS conductor-etch chamber in its notched-wafer configuration. It is a direct equivalent, not an OEM part, and is not affiliated with Applied Materials. Where a published OEM part number applies, it can be confirmed on request against your existing chamber configuration.
Frequently Asked Questions
Is the 150mm DPS Notch ESC an original Applied Materials part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the Applied Materials DPS ESC. It is not an OEM part and is not affiliated with Applied Materials.
Will it fit my DPS chamber without modification?
Yes. The 150mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
What does “Notch” mean on this ESC?
It designates the wafer-notch configuration — the mesa field, seal band and lift-pin pattern are aligned to a notched 6-inch wafer rather than a flatted one, so alignment and backside helium sealing remain correct for notched substrates.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
What wafer size and applications does it suit?
It is built for 6-inch (150mm) notched wafers on DPS conductor-etch processes, used on power devices (MOSFET, IGBT), analog and mixed-signal, MEMS, sensors, automotive and RF silicon.