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Endura ESC for 100mm (4-inch) Wafer Processing
The Endura ESC in its 100mm configuration is a direct equivalent for the Applied Materials Endura PVD chamber, engineered by ESC Technology to clamp and temperature-control 4-inch wafers during physical-vapour deposition. It mounts on the same cathode, power supply and gas connections as the original — a true drop-in with no chamber modification — and, unlike the OEM part, it is fully repairable.
Why a 100mm Endura?
Built specifically for the Endura PVD platform in 100mm, this equivalent delivers stable electrostatic clamping and helium-cooled temperature control so 4-inch deposition stays uniform run to run. Much 4-inch capacity — compound-semiconductor, RF, photonics and specialist device work — runs on legacy Endura tools the OEM no longer prioritises, and a maintainable ESC keeps those lines supported without a full tool refresh.
Design & Compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 4-inch wafer, holding tight temperature uniformity through deposition. Mechanically and electrically it matches the original, so it installs on the existing cathode with no requalification of the wider tool. Construction options (coated-ceramic and CP / Ceramic Plate) follow the ESC Technology family standard — the denser CP giving higher breakdown voltage and improved thermal control.
Repair & Reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower Cost of Ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 100mm Endura equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM Cross-Reference (100mm)
This 100mm Endura is a direct equivalent for the Applied Materials Endura PVD chamber. It is a direct equivalent, not an OEM part, and is not affiliated with Applied Materials. Where a published OEM part number applies, it can be confirmed on request against your existing chamber configuration.
Frequently Asked Questions
Is the 100mm Endura ESC an original Applied Materials part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the Applied Materials Endura ESC. It is not an OEM part and is not affiliated with Applied Materials.
Will it fit my Endura chamber without modification?
Yes. The 100mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Which OEM part number does the 100mm Endura replace?
The 100mm Endura is supplied as a direct equivalent for the Applied Materials Endura PVD chamber. Where a published OEM number applies to your configuration, our team can confirm the correct equivalent on request.
What wafer size and applications does it suit?
It is built for 4-inch (100mm) wafers on Endura PVD processes, typical of compound-semiconductor, RF, photonics and specialist legacy-device production.