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Exelan ESC for 150mm (6-inch) Wafer Processing
The Exelan ESC in its 150mm configuration is a direct equivalent for the Lam Research Exelan chamber, engineered by ESC Technology to clamp and temperature-control 6-inch wafers during dielectric etch. It mounts on the same cathode, power supply and gas connections as the original — a true drop-in with no chamber modification — and, unlike the OEM part, it is fully repairable.
Why a 150mm Exelan?
The Lam Exelan dielectric-etch platform runs on 150mm lines etching contacts, vias and oxide stacks for power, analog and RF devices. The 6-inch ESC provides the uniform clamping and backside cooling these high-aspect dielectric etches need, as a fully repairable drop-in for the Lam Research original.
Design & Compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 6-inch wafer, holding tight temperature uniformity through the process. It is offered in coated-ceramic (alumina) and CP (Ceramic Plate) constructions — the denser CP giving higher breakdown voltage and improved thermal control. Mechanically and electrically it matches the Lam Research original, so it installs on the existing cathode with no requalification of the wider tool.
Repair & Reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower Cost of Ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 150mm Exelan equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM Cross-Reference (150mm)
This 150mm Exelan is a direct equivalent to Lam Research part number(s) 839-440462-336. All known revised numbers are listed so both legacy and current part searches resolve here.
Frequently Asked Questions
Is the 150mm Exelan ESC an original Lam Research part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the Lam Research Exelan ESC. It is not an OEM part and is not affiliated with Lam Research.
Will it fit my Exelan chamber without modification?
Yes. The 150mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Which OEM part number does the 150mm Exelan replace?
It is a direct equivalent to Lam Research part number(s) 839-440462-336. Where the OEM has revised the number over time, all known equivalents are listed so legacy and current part searches both resolve here.
What wafer size and applications does it suit?
It is built for 6-inch (150mm) wafers, used on power devices (MOSFET, IGBT), analog and mixed-signal, MEMS, sensors, automotive and RF silicon.
ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by Lam Research. This product is a direct equivalent only — it is not an OEM part.