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MxP + Oxide ESC for 150mm (6-inch) Wafer Processing
The MxP + Oxide ESC in its 150mm configuration is a direct equivalent for the Applied Materials MxP + Oxide chamber, engineered by ESC Technology to clamp and temperature-control 6-inch wafers during dielectric etch. It mounts on the same cathode, power supply and gas connections as the original — a true drop-in with no chamber modification — and, unlike the OEM part, it is fully repairable.
Why a 150mm MxP + Oxide?
On 6-inch, MxP Oxide etch opens contacts, vias and dielectric layers for power and analog devices. Tight temperature uniformity across the 150mm wafer is what keeps high-aspect-ratio oxide features etching evenly, and the ESC’s repairability keeps these long-running tools economic.
Design & Compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 6-inch wafer, holding tight temperature uniformity through the process. It is offered in coated-ceramic (alumina) and CP (Ceramic Plate) constructions — the denser CP giving higher breakdown voltage and improved thermal control. Mechanically and electrically it matches the Applied Materials original, so it installs on the existing cathode with no requalification of the wider tool.
Repair & Reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower Cost of Ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 150mm MxP + Oxide equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM Cross-Reference (150mm)
This 150mm MxP + Oxide is a direct equivalent to Applied Materials part number(s) 0041-34851 – 0040-99952. All known revised numbers are listed so both legacy and current part searches resolve here.
Frequently Asked Questions
Is the 150mm MxP + Oxide ESC an original Applied Materials part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the Applied Materials MxP + Oxide ESC. It is not an OEM part and is not affiliated with Applied Materials.
Will it fit my MxP + Oxide chamber without modification?
Yes. The 150mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Which OEM part number does the 150mm MxP + Oxide replace?
It is a direct equivalent to Applied Materials part number(s) 0041-34851 – 0040-99952. Where the OEM has revised the number over time, all known equivalents are listed so legacy and current part searches both resolve here.
What wafer size and applications does it suit?
It is built for 6-inch (150mm) wafers, used on power devices (MOSFET, IGBT), analog and mixed-signal, MEMS, sensors, automotive and RF silicon.
ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by Applied Materials. This product is a direct equivalent only — it is not an OEM part.