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MxP Poly ESC for 100mm (4-inch) wafer processing
The MxP Poly ESC in its 100mm configuration is a direct equivalent for the Applied Materials MxP Poly chamber, engineered by ESC Technology to clamp and temperature-control 4-inch wafers during poly-silicon etch. It mounts on the same cathode, power supply and gas connections as the original (a true drop-in with no chamber modification) and, unlike the OEM part, it is fully repairable.
Why a 100mm MxP Poly?
Poly-silicon etch at 100mm is concentrated in MEMS, compound-semiconductor and discrete-device lines where 4-inch substrates dominate. The MxP Poly equivalent clamps the smaller wafer flat through the MERIE etch, keeping critical-dimension control and temperature uniformity tight on these specialty processes.
Design & compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 4-inch wafer, holding tight temperature uniformity through the process. It is offered in coated-ceramic (alumina) and CP (Ceramic Plate) constructions, the denser CP giving higher breakdown voltage and improved thermal control. Mechanically and electrically it matches the Applied Materials original, so it installs on the existing cathode with no requalification of the wider tool.
Repair & reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower cost of ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 100mm MxP Poly equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM cross-reference (100mm)
The 100mm MxP Poly is specified by chamber and wafer size; it carries no single published OEM cross-reference. Contact us with your Applied Materials part number for the confirmed direct equivalent.
Frequently asked questions
Is the 100mm MxP Poly ESC an original Applied Materials part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the Applied Materials MxP Poly ESC. It is not an OEM part and is not affiliated with Applied Materials.
Will it fit my MxP Poly chamber without modification?
Yes. The 100mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Does the 100mm MxP Poly have an OEM equivalent number?
The 100mm MxP Poly is specified by chamber type and wafer size rather than a single published cross-reference. Contact us with your current Applied Materials part number and we will confirm the direct equivalent.
What wafer size and applications does it suit?
It is built for 4-inch (100mm) wafers, used on compound-semiconductor (GaAs RF/microwave), LEDs and optoelectronics, photonics, discrete power, MEMS and pilot/R&D lines.
ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by Applied Materials. This product is a direct equivalent only. It is not an OEM part.