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SCCM ESC for 200mm (8-inch) Wafer Processing
The SCCM ESC in its 200mm configuration is a direct equivalent for the Tokyo Electron SCCM chamber, engineered by ESC Technology to clamp and temperature-control 8-inch wafers during plasma etch. It mounts on the same cathode, power supply and gas connections as the original — a true drop-in with no chamber modification — and, unlike the OEM part, it is fully repairable.
Why a 200mm SCCM?
The SCCM chamber runs 200mm plasma etch on legacy Tokyo Electron tools; a precisely made equivalent that holds clamping force and backside cooling keeps etch uniformity consistent run to run. A repairable part simplifies spares for lines the OEM no longer prioritises, and supports ceramic and polyimide replacement builds.
Design & Compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 8-inch wafer, holding tight temperature uniformity through the process. Mechanically and electrically it matches the Tokyo Electron original, so it installs on the existing cathode with no requalification of the wider tool. Construction options (coated-ceramic and CP / Ceramic Plate) follow the ESC Technology family standard — the denser CP giving higher breakdown voltage and improved thermal control.
Repair & Reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower Cost of Ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 200mm SCCM equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM Cross-Reference (200mm)
This 200mm SCCM is a direct equivalent for the Tokyo Electron SCCM chamber (OEM references ES1D85-010783-13 and 1D85-010782-13). It is a direct equivalent, not an OEM part, and is not affiliated with Tokyo Electron. Where a published OEM part number applies, it can be confirmed on request against your existing chamber configuration.
Frequently Asked Questions
Is the 200mm SCCM ESC an original Tokyo Electron part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the Tokyo Electron SCCM ESC. It is not an OEM part and is not affiliated with Tokyo Electron.
Will it fit my SCCM chamber without modification?
Yes. The 200mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Which OEM part number does the 200mm SCCM replace?
The 200mm SCCM is supplied as a direct equivalent for the Tokyo Electron SCCM chamber. The applicable OEM reference is ES1D85-010783-13 and 1D85-010782-13; our team can confirm the correct equivalent for your configuration on request.
What wafer size and applications does it suit?
It is built for 8-inch (200mm) wafers on 200mm plasma-etch processes typical of mature-node production.