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Pegasus ESC for 100mm (4-inch) Wafer Processing
The SPTS Pegasus ESC in its 100mm configuration is a direct equivalent for the SPTS Pegasus deep-silicon-etch platform, engineered by ESC Technology to clamp and temperature-control 4-inch wafers during deep reactive ion etch (DRIE). It mounts on the same cathode, power supply and gas connections as the original — a true drop-in with no chamber modification — and, unlike the OEM part, it is fully repairable.
Why a 100mm Pegasus?
Compound-semiconductor, photonics and specialist MEMS work on 4-inch Pegasus tools relies on deep-silicon etch with tight thermal control. A precisely made 100mm equivalent maintains clamping force and backside cooling through the etch, and as a repairable part it keeps legacy 4-inch DRIE lines running economically.
Design & Compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 4-inch wafer, holding tight temperature uniformity through the process. Mechanically and electrically it matches the SPTS Technologies original, so it installs on the existing cathode with no requalification of the wider tool. Construction options (coated-ceramic and CP / Ceramic Plate) follow the ESC Technology family standard — the denser CP giving higher breakdown voltage and improved thermal control.
Repair & Reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower Cost of Ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 100mm Pegasus equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM Cross-Reference (100mm)
This 100mm Pegasus is a direct equivalent for the SPTS Pegasus deep-silicon-etch platform (OEM reference FB320853). It is a direct equivalent, not an OEM part, and is not affiliated with SPTS Technologies. Where a published OEM part number applies, it can be confirmed on request against your existing chamber configuration.
Frequently Asked Questions
Is the 100mm Pegasus ESC an original SPTS Technologies part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the SPTS Technologies Pegasus ESC. It is not an OEM part and is not affiliated with SPTS Technologies.
Will it fit my Pegasus chamber without modification?
Yes. The 100mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Which OEM part number does the 100mm Pegasus replace?
The 100mm Pegasus is supplied as a direct equivalent for the SPTS Pegasus deep-silicon-etch platform. The applicable OEM reference is FB320853; our team can confirm the correct equivalent for your configuration on request.
What wafer size and applications does it suit?
It is built for 4-inch (100mm) wafers on deep-silicon etch for compound-semiconductor, photonics and specialist MEMS production.