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Pegasus ESC for 150mm (6-inch) Wafer Processing
The SPTS Pegasus ESC in its 150mm configuration is a direct equivalent for the SPTS Pegasus deep-silicon-etch platform, engineered by ESC Technology to clamp and temperature-control 6-inch wafers during deep reactive ion etch (DRIE). It mounts on the same cathode, power supply and gas connections as the original — a true drop-in with no chamber modification — and, unlike the OEM part, it is fully repairable.
Why a 150mm Pegasus?
Much MEMS, power-device and sensor production still runs on 6-inch Pegasus tools, where deep-silicon etch depends on stable clamping and consistent backside-helium cooling through long Bosch-process cycles. A precisely made 150mm equivalent holds etch profiles run to run, and because it is maintainable rather than disposable it keeps 6-inch DRIE capacity supported without a full tool refresh.
Design & Compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 6-inch wafer, holding tight temperature uniformity through the process. Mechanically and electrically it matches the SPTS Technologies original, so it installs on the existing cathode with no requalification of the wider tool. Construction options (coated-ceramic and CP / Ceramic Plate) follow the ESC Technology family standard — the denser CP giving higher breakdown voltage and improved thermal control.
Repair & Reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower Cost of Ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 150mm Pegasus equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM Cross-Reference (150mm)
This 150mm Pegasus is a direct equivalent for the SPTS Pegasus deep-silicon-etch platform (OEM references 162901 and FB321943). It is a direct equivalent, not an OEM part, and is not affiliated with SPTS Technologies. Where a published OEM part number applies, it can be confirmed on request against your existing chamber configuration.
Frequently Asked Questions
Is the 150mm Pegasus ESC an original SPTS Technologies part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the SPTS Technologies Pegasus ESC. It is not an OEM part and is not affiliated with SPTS Technologies.
Will it fit my Pegasus chamber without modification?
Yes. The 150mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Which OEM part number does the 150mm Pegasus replace?
The 150mm Pegasus is supplied as a direct equivalent for the SPTS Pegasus deep-silicon-etch platform. The applicable OEM reference is 162901 and FB321943; our team can confirm the correct equivalent for your configuration on request.
What wafer size and applications does it suit?
It is built for 6-inch (150mm) wafers on deep-silicon etch for MEMS, power devices, sensors and RF.