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Pegasus ESC for 200mm (8-inch) Wafer Processing
The SPTS Pegasus ESC in its 200mm configuration is a direct equivalent for the SPTS Pegasus deep-silicon-etch platform, engineered by ESC Technology to clamp and temperature-control 8-inch wafers during deep reactive ion etch (DRIE). It mounts on the same cathode, power supply and gas connections as the original — a true drop-in with no chamber modification — and, unlike the OEM part, it is fully repairable.
Why a 200mm Pegasus?
The Pegasus platform is built for deep reactive ion etching — the high-aspect-ratio, Bosch-process cycles behind MEMS structures, through-silicon vias (TSV) and advanced-packaging features. Those long, high-power etches place heavy thermal and electrostatic demand on the ESC, so a precisely made equivalent that holds clamping force and backside-helium cooling across the full cycle keeps etch profiles and sidewall angles consistent. Because it is a maintainable part rather than a consumable, it also simplifies spares planning for busy MEMS and packaging lines.
Design & Compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 8-inch wafer, holding tight temperature uniformity through the process. Mechanically and electrically it matches the SPTS Technologies original, so it installs on the existing cathode with no requalification of the wider tool. Construction options (coated-ceramic and CP / Ceramic Plate) follow the ESC Technology family standard — the denser CP giving higher breakdown voltage and improved thermal control.
Repair & Reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower Cost of Ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 200mm Pegasus equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM Cross-Reference (200mm)
This 200mm Pegasus is a direct equivalent for the SPTS Pegasus deep-silicon-etch platform (OEM reference FB319626). It is a direct equivalent, not an OEM part, and is not affiliated with SPTS Technologies. Where a published OEM part number applies, it can be confirmed on request against your existing chamber configuration.
Frequently Asked Questions
Is the 200mm Pegasus ESC an original SPTS Technologies part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the SPTS Technologies Pegasus ESC. It is not an OEM part and is not affiliated with SPTS Technologies.
Will it fit my Pegasus chamber without modification?
Yes. The 200mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Which OEM part number does the 200mm Pegasus replace?
The 200mm Pegasus is supplied as a direct equivalent for the SPTS Pegasus deep-silicon-etch platform. The applicable OEM reference is FB319626; our team can confirm the correct equivalent for your configuration on request.
What wafer size and applications does it suit?
It is built for 8-inch (200mm) wafers on deep reactive ion etch (DRIE) for MEMS, through-silicon vias (TSV), advanced packaging and power devices.