The TM207208 is a direct-equivalent ESC for the Lam Research TCP 9600 / 9400 etch platform, supplied by ESC Technology as a drop-in replacement for OEM part numbers 718-043893-801 and 718-094523-281.
What the ESC does, and why its condition matters
Drop-in compatibility and qualification
Designed to qualify into the existing TCP 9600 / 9400 chamber.
Specifications
| Platform | Lam Research TCP 9600 / 9400 (etch) |
| ESC Technology part no. | TM207208 |
| Clamping type | Monopolar |
| Wafer sizes | 150, 200mm |
OEM cross-reference
| OEM (Lam Research) part no. | ESC Technology equivalent |
| 718-043893-801 | TM207208 |
| 718-094523-281 | TM207208 |
Lam Research part numbers can change over time; superseded and current numbers resolve to this page.
Frequently asked questions
Is the TM207208 a direct equivalent for the LAM TCP 9600 / 9400 ESC?
Yes, it is a direct-equivalent ESC replacing LAM 718-043893-801 and 718-094523-281.
Which OEM part numbers does it replace?
718-043893-801 and 718-094523-281.
Where is it supplied?
North America, Europe, South-East Asia and Japan.
Request a quotation: send us your OEM part number or chamber and we’ll confirm the equivalent and lead time.
ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by Lam Research. This product is a direct equivalent only. It is not an OEM part.