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TCP 9606 ESC for 150mm (6-inch) Wafer Processing
The TCP 9606 ESC in its 150mm configuration is a direct equivalent for the Lam Research TCP 9606 chamber, engineered by ESC Technology to clamp and temperature-control 6-inch wafers during transformer-coupled-plasma (TCP) etch. It mounts on the same cathode, power supply and gas connections as the original — a true drop-in with no chamber modification — and, unlike the OEM part, it is fully repairable.
Why a 150mm TCP 9606?
Built for both metal- and poly-etch duty on the 9606 platform in 150mm, this equivalent delivers consistent electrostatic clamping and helium-cooled temperature control so 6-inch etches stay uniform run to run. Because it is a maintainable part rather than a consumable replacement, it simplifies spares planning for fabs still running 6-inch TCP lines the OEM no longer prioritises.
Design & Compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 6-inch wafer, holding tight temperature uniformity through the process. Mechanically and electrically it matches the Lam Research original, so it installs on the existing cathode with no requalification of the wider tool. Construction options (coated-ceramic and CP / Ceramic Plate) follow the ESC Technology family standard — the denser CP giving higher breakdown voltage and improved thermal control.
Repair & Reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower Cost of Ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 150mm TCP 9606 equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM Cross-Reference (150mm)
This 150mm TCP 9606 is a direct equivalent for the Lam Research TCP 9606 metal/poly-etch chamber. It is a direct equivalent, not an OEM part, and is not affiliated with Lam Research. The published OEM part number can be confirmed on request against your existing chamber configuration.
Frequently Asked Questions
Is the 150mm TCP 9606 ESC an original Lam Research part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the Lam Research TCP 9606 ESC. It is not an OEM part and is not affiliated with Lam Research.
Will it fit my TCP 9606 chamber without modification?
Yes. The 150mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
Does it handle both metal and poly etch?
Yes. The 150mm TCP 9606 equivalent is built for both metal- and poly-etch duty on the 9606 platform, delivering consistent clamping and helium-cooled uniformity across either process.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
What wafer size and applications does it suit?
It is built for 6-inch (150mm) wafers on Lam TCP metal- and poly-etch processes, typical of mature-node power, analog, MEMS, sensor and RF production.