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TE8500 ESC for 200mm (8-inch) wafer processing
The TE8500 ESC is a direct equivalent for the Tokyo Electron TE8500 platform, engineered by ESC Technology to clamp and temperature-control 8-inch wafers during plasma processing. It mounts on the same cathode, power supply and gas connections as the original (a true drop-in with no platform modification) and, unlike the OEM part, it is fully repairable.
Why the TE8500 equivalent?
A large installed base of TE8500 platforms is still in production on 200mm lines. ESC Technology’s direct-equivalent ESC keeps these tools economic to run. The same ESC can be reconditioned and rebuilt rather than replaced at OEM prices, extending tool life and lowering cost of ownership.
Design & compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 8-inch wafer, holding tight temperature uniformity through the process. ESC Technology’s range is offered in coated-ceramic (alumina) and CP (Ceramic Plate) constructions, the denser CP giving higher breakdown voltage and improved thermal control; we confirm the construction that matches your process on enquiry. Mechanically and electrically it matches the Tokyo Electron original and installs on the existing cathode with no requalification of the wider tool.
Repair & reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower cost of ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the TE8500 equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM cross-reference
This TE8500 ESC is a direct equivalent to Tokyo Electron part number 1885-023137-17. All known revised numbers are listed so both legacy and current part searches resolve here.
Frequently asked questions
Is the TE8500 ESC an original Tokyo Electron part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the Tokyo Electron TE8500 ESC. It is not an OEM part and is not affiliated with Tokyo Electron.
Will it fit my TE8500 platform without modification?
Yes. It mounts on the same cathode, power supply and gas connections as the original, so it is a drop-in replacement with no chamber modification.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of new) and a Level 2 full strip-and-rebuild (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Which OEM part number does the TE8500 replace?
It is a direct equivalent to Tokyo Electron part number 1885-023137-17. Where the OEM has revised the number over time, all known equivalents are listed so legacy and current searches both resolve here.
What wafer size does the TE8500 suit?
It is built for 8-inch (200mm) wafers, used on 200mm device manufacturing across etch and deposition steps.
ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by Tokyo Electron. This product is a direct equivalent only. It is not an OEM part.