The TM106008 is a direct-equivalent ESC for the Applied Materials Ultima / DPS II chamber, supplied by ESC Technology as a drop-in replacement for OEM part numbers 0040-18053 and 0040-54755. It replaces the OEM ESC, is made from the same material and to the same design, and fits directly onto the OEM cathode. This product does not include a Wafer Temperature Monitor: for the version that does, see the Ultima TM106108-18219.
What the ESC does, and why its condition matters
In the Ultima / DPS II chamber the ESC clamps the wafer flat against the cathode and holds its temperature through the process. Clamping stability and thermal uniformity feed directly into etch uniformity and particle performance, so the ESC’s condition sets the ceiling on yield. Because the Ultima / DPS II platform runs at 300mm as well as 150/200mm, that thermal and clamping stability matters across a wide installed base, and an ESC that has drifted out of specification quietly caps the chamber long before it is formally failed.
A like-for-like equivalent: built to a higher quality standard
Rather than re-engineering the ESC, the TM106008 is made from the same material and to the same design as the OEM part, so it behaves exactly as the original in the chamber while fitting directly onto the OEM cathode. The difference ESC Technology brings is in build quality and consistency: consistent high quality on every ESC, excellent quality control, and extensive final test before each ESC ships to the customer. For a process that is already qualified on the OEM ESC, a like-for-like equivalent is the lowest-risk way to take cost out, because there is no design change to re-qualify.
Material
Made from the same material as the OEM ESC, so its thermal and clamping behaviour match the original.
Process and particle performance
Because it matches the OEM material and design, the ESC delivers OEM-equivalent process behaviour, with the consistency that comes from tight quality control and full final test, supporting steady etch results and particle performance across the ESC’s life. The value is in predictability: an ESC that performs exactly as the qualified original, but at a lower acquired and lifetime cost.
Drop-in compatibility and qualification
- Fits directly onto the OEM cathode: no hardware modification.
- Made to the same design as the OEM ESC, so the qualified process does not change.
- Does not include a Wafer Temperature Monitor (see the Ultima TM106108-18219 for the WTM-equipped version).
Sizes
Available for 150mm, 200mm and 300mm wafer processing, the same equivalent spans the full Ultima / DPS II size range.
Repairable to new: lower cost of ownership
The TM106008 is built to be reconditioned to original specification rather than scrapped. Level 1 (surface recondition, ~25% of new) and Level 2 (full rebuild, ~70%) repair routes are available, up to three times per ESC, which materially reduces lifetime cost of ownership versus repeated OEM purchases and turns each ESC into a reusable asset. (Repair pricing is indicative and quoted per ESC after inspection.)
Why source the equivalent from ESC Technology
A like-for-like equivalent with no design change to re-qualify, built to consistent quality with full final test, backed by the repair programme above and supported across North America, Europe, South-East Asia and Japan.
Specifications
| Chamber / platform | Applied Materials Ultima / DPS II |
| ESC Technology part no. | TM106008N |
| Design | Same material and design as OEM |
| Wafer Temperature Monitor | Not included |
| Cathode | Fits directly onto OEM cathode |
| Quality | Full QC and extensive final test before ship |
| Wafer sizes | 150mm, 200mm, 300mm |
| Repairable | Yes: Level 1 & Level 2, up to 3× |
OEM cross-reference
| OEM (Applied Materials) part no. | ESC Technology equivalent |
| 0040-18053 | TM106008N |
| 0040-54755 | TM106008N |
Applied Materials periodically revises part numbers, and both superseded and current numbers resolve to this page. OEM 0040-18136 is the 150mm equivalent for this family and is covered on the Ultima / DPS II ESC (150mm) page.
Frequently asked questions
Is the TM106008 a direct drop-in for the AMAT Ultima / DPS II ESC?
Yes, it is made to the same design and fits directly onto the OEM cathode, replacing OEM 0040-18053 and 0040-54755.
Does it include a Wafer Temperature Monitor?
No. For the version that includes a Wafer Temperature Monitor, see the Ultima TM106108-18219.
How is it different from the OEM ESC?
It is made from the same material and to the same design as the OEM part; the difference is ESC Technology’s build quality, quality control and full final test, plus repairability.
Will I need to re-qualify my process?
Because it is a like-for-like equivalent with no design change, it is the lowest-risk way to take cost out of a qualified process.
Which OEM part numbers does it replace?
0040-18053 and 0040-54755.
What wafer sizes are available?
150mm, 200mm and 300mm.
Can it be repaired, and how many times?
Up to three times, via Level 1 or Level 2 repair (indicatively ~25% and ~70% of new).
Where is it supplied?
North America, Europe, South-East Asia and Japan.
One equivalent across the Ultima / DPS II fleet, including 300mm
Because the TM106008 matches the OEM material and design, it can be qualified once and then standardised across an Ultima / DPS II install base that spans 150mm, 200mm and 300mm chambers. That makes spares planning simpler: a single repairable equivalent serves the whole fleet, and the repair-and-rotate model means an ESC pulled from any chamber can be reconditioned and returned to any other. For a fab running 300mm Ultima chambers alongside legacy 200mm tools, consolidating on one like-for-like equivalent reduces the number of distinct ESCs to stock, qualify and track, while keeping every chamber on an ESC that behaves exactly like the original.
Request a quotation: send us your OEM part number or chamber and we’ll confirm the equivalent and lead time.
ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by Applied Materials. This product is a direct equivalent only. It is not an OEM part.