The TM106108 is a direct-equivalent ESC for the Applied Materials Ultima chamber, supplied by ESC Technology as a drop-in replacement for OEM part numbers 0040-18208 and 0040-18219. It replaces the OEM ESC, is made from the same material and to the same design, and fits directly onto the OEM cathode. This product includes a Wafer Temperature Monitor: the key difference from the Ultima / DPS II TM106008N.
What the ESC does, and why its condition matters
In the Ultima chamber the ESC clamps the wafer flat against the cathode and holds its temperature through the process. The integrated Wafer Temperature Monitor adds in-process temperature visibility, which supports tighter control of etch uniformity and yield, particularly valuable on processes where wafer temperature is a critical, closely-controlled parameter. As with any ESC, clamping stability and thermal uniformity set the ceiling on what the chamber can achieve, so the ESC’s condition is central to steady production.
A like-for-like equivalent: with a Wafer Temperature Monitor
The TM106108 is made from the same material and to the same design as the OEM Ultima ESC, so it behaves exactly as the original while fitting directly onto the OEM cathode. It is supplied with a Wafer Temperature Monitor for applications that require in-process temperature measurement. As with all ESC Technology ESCs, the difference is in build quality and consistency: full quality control and extensive final test before each ESC ships. For a qualified process, a like-for-like equivalent with the same WTM capability is the lowest-risk route to lower cost, since there is no design change to re-qualify.
Material
Made from the same material as the OEM ESC.
Process and particle performance
Matching the OEM material and design gives OEM-equivalent process behaviour, while the Wafer Temperature Monitor provides the temperature data needed to keep the process in spec. Tight quality control and full final test support steady etch results and particle performance across the ESC’s life, predictable behaviour at a lower acquired and lifetime cost.
Drop-in compatibility and qualification
- Fits directly onto the OEM cathode: no hardware modification.
- Made to the same design as the OEM ESC.
- Includes a Wafer Temperature Monitor.
Sizes
Available for 150mm, 200mm and 300mm wafer processing.
Repairable to new: lower cost of ownership
Built to be reconditioned to original specification rather than scrapped. Level 1 (~25% of new) and Level 2 (~70%) repair routes are available, up to three times per ESC, materially reducing lifetime cost of ownership and turning each ESC into a reusable asset. (Repair pricing is indicative and quoted per ESC after inspection.)
Why source the equivalent from ESC Technology
A like-for-like equivalent with the same WTM capability and no design change to re-qualify, built to consistent quality with full final test, backed by the repair programme and supported across North America, Europe, South-East Asia and Japan.
Using the integrated Wafer Temperature Monitor
The integrated Wafer Temperature Monitor is the reason to specify the TM106108 over the non-WTM TM106008N, and it earns its place on processes where wafer temperature is a critical, closely-controlled parameter. By providing in-process temperature visibility at the ESC, it lets engineers confirm that the wafer is sitting at the intended temperature throughout the process rather than inferring it indirectly, which matters most on steps where a few degrees of drift changes etch rate or profile. In practice the monitor supports tighter process control and faster fault diagnosis: a temperature excursion can be seen directly rather than being chased through its downstream effects on the wafer. Because the ESC is otherwise made to the same material and design as the OEM Ultima part and fits directly onto the OEM cathode, adding the monitored equivalent does not change the qualified process. It adds instrumentation, not a new variable. Fabs that run some Ultima chambers with temperature monitoring and others without can mix the TM106108 and TM106008N across the fleet as each process requires, while keeping a single repairable ESC family and one repair-and-rotate pool behind both.
Specifications
| Chamber / platform | Applied Materials Ultima |
| ESC Technology part no. | TM106108-18219 |
| Design | Same material and design as OEM |
| Wafer Temperature Monitor | Included |
| Cathode | Fits directly onto OEM cathode |
| Quality | Full QC and extensive final test before ship |
| Wafer sizes | 150mm, 200mm, 300mm |
| Repairable | Yes: Level 1 & Level 2, up to 3× |
OEM cross-reference
| OEM (Applied Materials) part no. | ESC Technology equivalent |
| 0040-18208 | TM106108-18219 |
| 0040-18219 | TM106108-18219 |
Applied Materials periodically revises part numbers, and both superseded and current numbers resolve to this page. OEM 0040-18136 is the 150mm equivalent for this family and is covered on the Ultima / DPS II ESC (150mm) page.
Frequently asked questions
Is the TM106108 a direct drop-in for the AMAT Ultima ESC?
Yes, it is made to the same design and fits directly onto the OEM cathode, replacing OEM 0040-18208 and 0040-18219.
Does it include a Wafer Temperature Monitor?
Yes. For the version without a Wafer Temperature Monitor, see the Ultima / DPS II TM106008N.
How is it different from the OEM ESC?
It is made from the same material and to the same design as the OEM part; the difference is ESC Technology’s build quality, full final test, the integrated Wafer Temperature Monitor and repairability.
Which OEM part numbers does it replace?
0040-18208 and 0040-18219.
What wafer sizes are available?
150mm, 200mm and 300mm.
Can it be repaired, and how many times?
Up to three times, via Level 1 or Level 2 repair (indicatively ~25% and ~70% of new).
What is the difference between this and the TM106008N?
This ESC includes a Wafer Temperature Monitor; the TM106008N does not.
Where is it supplied?
North America, Europe, South-East Asia and Japan.
Request a quotation: send us your OEM part number or chamber and we’ll confirm the equivalent and lead time.
ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by Applied Materials. This product is a direct equivalent only. It is not an OEM part.