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UNITY ESC for 150mm (6-inch) wafer processing
The UNITY ESC is a direct equivalent for the Tokyo Electron UNITY platform, engineered by ESC Technology to clamp and temperature-control 6-inch wafers during plasma processing. It mounts on the same cathode, power supply and gas connections as the original (a true drop-in with no platform modification) and, unlike the OEM part, it is fully repairable.
Why the UNITY equivalent?
The UNITY platform is supplied for 150mm (6-inch) wafer processing. ESC Technology’s direct-equivalent ESC lets fabs keep these tools running by repairing the ESC rather than buying new, holding tight temperature control across the 6-inch wafer through the process.
Design & compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 6-inch wafer, holding tight temperature uniformity through the process. ESC Technology’s range is offered in coated-ceramic (alumina) and CP (Ceramic Plate) constructions, the denser CP giving higher breakdown voltage and improved thermal control; we confirm the construction that matches your process on enquiry. Mechanically and electrically it matches the Tokyo Electron original and installs on the existing cathode with no requalification of the wider tool.
Repair & reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower cost of ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the UNITY equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM cross-reference
The 150mm UNITY is specified by platform and wafer size; it carries no single published OEM cross-reference. Contact us with your Tokyo Electron part number for the confirmed direct equivalent.
Frequently asked questions
Is the UNITY ESC an original Tokyo Electron part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the Tokyo Electron UNITY ESC. It is not an OEM part and is not affiliated with Tokyo Electron.
Will it fit my UNITY platform without modification?
Yes. It mounts on the same cathode, power supply and gas connections as the original, so it is a drop-in replacement with no chamber modification.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of new) and a Level 2 full strip-and-rebuild (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Does the UNITY have an OEM equivalent number?
The UNITY is specified by platform and wafer size rather than a single published cross-reference. Contact us with your current Tokyo Electron part number and we will confirm the direct equivalent.
What wafer size does the UNITY suit?
It is built for 6-inch (150mm) wafers, used on power devices, analog and mixed-signal, MEMS, sensors and RF silicon still produced at 150mm.
ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by Tokyo Electron. This product is a direct equivalent only. It is not an OEM part.