Home › LAM ESC Replacements and Repairs
ESC Technology builds direct-equivalent ESCs for LAM etch chambers and repairs worn ESCs back to original specification. The current range covers the Exelan dielectric etch platform and the TCP transformer-coupled-plasma etch platform, in 150mm and 200mm. Each part is cross-referenced to the Lam Research number it replaces.
The table lists the LAM platforms we currently build an ESC for, with the wafer sizes available and the Lam Research numbers each one replaces. Each wafer size is a separate part with its own page, because the OEM number changes with the size.
| Chamber or platform | Wafer sizes | Lam Research equivalents | ESC page |
|---|---|---|---|
| Exelan (dielectric etch) | 200mm, 150mm | 839-440462-508 · 839-440462-108 · 839-440462-336 (150mm) | 200mm 150mm |
| TCP 9600 / 9400 (TCP etch) | 200mm | 718-043893-801 · 718-094523-281 | 200mm |
| TCP 9606 (metal and poly etch) | 150mm | Confirmed on request | 150mm |
Our LAM coverage is narrower than our AMAT range, and it grows by request. If you run a LAM chamber that is not listed, tell us the platform and the part number. We build to demand, and several existing pages started as one customer enquiry.
The two platforms ask different things of the ESC. Exelan runs dielectric etch, where the ESC has to hold clamping force and backside helium cooling through long, high-power steps. TCP chambers run metal and poly etch, where the priority is repeatable clamping and even temperature across the wafer so that the etch stays uniform run to run.
Both duties come back to the same two properties: stable clamping force and good thermal contact. When an ESC ages, those drift. The symptoms are familiar: wafers that stick at the end of the process, failed or slow dechucking, particle excursions, and a gradual loss of temperature uniformity. Our equivalents are built to restore both properties, and to be reconditioned when they drift again.
The Lam Research numbers on these parts use the 839 and 718 prefixes. As with any OEM, the number identifies a revision as well as a part, and numbers get revised over the life of a platform. One physical ESC can therefore appear under more than one number.
Each product page lists every number we hold for that part, so a legacy number and a current number both lead to the same equivalent. Always check the wafer size first. The 200mm and 150mm builds of the same chamber family are different parts and are not interchangeable.
Every ESC we build is designed to be repaired rather than scrapped. There are two routes.
An ESC can typically be returned to original specification up to three times. CP (Ceramic Plate) builds are Level 2 only, because the repair route on those parts is to remove the whole ceramic plate and reattach it. Where the part number carries the CP designation, plan on Level 2 and confirm with us before you budget for a surface recondition.
The installed base of 150mm and 200mm LAM etch tools is still producing power devices, analogue parts, MEMS, sensors and RF devices. Those tools are productive, but they are mature, and spares for mature platforms get slower and more expensive as the OEM focuses on current nodes.
A direct equivalent fits the existing cathode, so the chamber does not change and the recipe does not change. The part can then be reconditioned repeatedly rather than replaced at OEM prices, which is where most of the lifetime saving comes from.
We build direct-equivalent ESCs for other OEM platforms as well: AMAT ESC replacements, TEL ESC replacements, SPTS ESC replacements.
No. They are direct equivalents designed and built independently by ESC Technology to fit and function in place of the original. ESC Technology is not affiliated with, authorised by, or endorsed by Lam Research Corporation.
Exelan dielectric etch in 200mm and 150mm, TCP 9600 and TCP 9400 in 200mm, and TCP 9606 in 150mm. Other LAM platforms are built to demand, so it is worth asking if yours is not listed.
Yes. Each ESC mounts on the existing cathode and uses the same power supply and helium connections as the original, so it is a drop-in replacement and the surrounding hardware does not need requalification.
Yes. The 150mm TCP 9606 equivalent is built for both metal and poly etch duty on the 9606 platform, with consistent clamping and helium-cooled uniformity across either process.
Yes. Level 1 is a surface recondition at indicatively around 25% of the price of a new ESC. Level 2 is a full strip and rebuild to the frame at around 70%. An ESC can typically be returned to specification up to three times. CP (Ceramic Plate) builds are Level 2 only.
Send us the OEM part number, the wafer size and the platform. We will confirm the correct LAM equivalent, or quote the repair, for your chamber configuration.
ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by Lam Research Corporation. All products described on this page are direct equivalents only. They are not OEM parts. Repair percentages are indicative and are quoted per ESC after inspection.
