The latest materials technology is used to create our latest Super-E ESC, which replaces OEM part numbers 0040-39990, 0010-05966.
TM105708VN-CP uses our latest Super Dense CP alumina as the dielectric, a material developed and used in advanced 300mm ESCs. This material delivers maximum lifetime and problem-free processing, due to the highest density and breakdown voltage in the market. The ESC can then be repaired multiple times to new condition, decreasing cost of ownership.
This Coulombic design means no wafer de-chucking or sticking problems, and reduces chamber maintenance and wafer breakages because of this.
The ESC is a drop-in replacement, and uses the OEM cathode, power supply and process kits, so our customers have minimal change to make. Please contact your local ESCT office to arrange an evaluation of our industry-leading ESC TM105708-VN-CP.