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ESC Technology builds direct-equivalent ESCs for the SPTS Pegasus deep silicon etch platform, and repairs worn ESCs back to original specification. The range covers 100mm, 150mm and 200mm wafers. These are the tools behind MEMS structures, through-silicon vias and advanced packaging features, and they place heavy thermal and electrostatic demand on the ESC.
The table lists the SPTS builds we currently supply, with the SPTS numbers each one replaces. Each wafer size is a separate part with its own page, because the OEM number changes with the size.
| Chamber or platform | Wafer sizes | SPTS equivalents | ESC page |
|---|---|---|---|
| Pegasus (DRIE) | 200mm | FB319626 | 200mm |
| Pegasus (DRIE) | 150mm | 162901 · FB321943 | 150mm |
| Pegasus (DRIE) | 100mm | FB320853 | 100mm |
If you run an SPTS chamber that is not listed, tell us the platform and the part number. We add builds when there is real demand.
Deep reactive ion etch is not a short process. The Bosch process cycles between etch and passivation steps, many times, to produce high-aspect-ratio features. Those long, high-power etches load the ESC in two ways at once. The clamping force has to stay constant for the whole cycle, and the backside helium cooling has to keep the wafer at a stable temperature while the plasma puts heat into it.
If either drifts, the etch drifts with it. Sidewall angle and profile depth stop being repeatable across the wafer and from run to run. That is why a precisely made equivalent matters more on a DRIE tool than on a short-recipe chamber. It is also why we build these as maintainable parts rather than consumables, which makes spares planning simpler on busy MEMS and packaging lines.
Every ESC we build is designed to be repaired rather than scrapped. There are two routes.
An ESC can typically be returned to original specification up to three times. CP (Ceramic Plate) builds are Level 2 only, because the repair route on those parts is to remove the whole ceramic plate and reattach it. On a DRIE tool that repairability is worth more than it looks, because the ESC is in the process for far longer per wafer than on a short-recipe etch chamber.
MEMS and advanced packaging lines run at high utilisation, and an ESC out of service takes a whole chamber with it. The usual pressure points are lead time and lifetime cost, not the headline price of a single part.
A direct equivalent fits the existing cathode, so the chamber does not change and the recipe does not change. The same part can then be reconditioned repeatedly instead of replaced, which is where most of the lifetime saving comes from.
We build direct-equivalent ESCs for other OEM platforms as well: AMAT ESC replacements, LAM ESC replacements, TEL ESC replacements.
No. They are direct equivalents designed and built independently by ESC Technology to fit and function in place of the original. ESC Technology is not affiliated with, authorised by, or endorsed by SPTS Technologies.
The Pegasus deep silicon etch platform, in 100mm, 150mm and 200mm. Other SPTS platforms are considered on request.
Yes. The ESC mounts on the existing cathode and uses the same power supply and helium connections as the original, so it is a drop-in replacement and the surrounding hardware does not need requalification.
That is what it is built for. The Bosch process cycles between etch and passivation for long periods, so the ESC has to hold clamping force and backside helium cooling across the whole cycle to keep etch profiles and sidewall angles consistent.
Yes. Level 1 is a surface recondition at indicatively around 25% of the price of a new ESC. Level 2 is a full strip and rebuild to the frame at around 70%. An ESC can typically be returned to specification up to three times. CP (Ceramic Plate) builds are Level 2 only.
Send us the OEM part number, the wafer size and the platform. We will confirm the correct SPTS equivalent, or quote the repair, for your chamber configuration.
ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by SPTS Technologies. All products described on this page are direct equivalents only. They are not OEM parts. Repair percentages are indicative and are quoted per ESC after inspection.
