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ESC Technology builds direct-equivalent ESCs for TEL process chambers and repairs worn ESCs back to original specification. The range covers the TE8500, SCCM, UNITY and DRM platforms in 150mm and 200mm. We also repair TEL OEM-supplied 300mm ESCs, which is a separate service from our replacement-part range.
The table lists the TEL platforms we currently build an ESC for, with the wafer sizes available and the Tokyo Electron numbers each one replaces. Each wafer size is a separate part with its own page, because the OEM number changes with the size.
| Chamber or platform | Wafer sizes | Tokyo Electron equivalents | ESC page |
|---|---|---|---|
| TE8500 | 200mm, 150mm | 1885-023137-17 | 200mm 150mm |
| SCCM | 200mm | ES1D85-010783-13 · 1D85-010782-13 | 200mm |
| UNITY | 150mm | Confirmed on request | 150mm |
| DRM | 200mm | Confirmed on request | 200mm |
Some TEL builds are supplied to qualified customers only, so no public number is shown against them. That does not mean the part is unavailable. Contact us with the platform and the wafer size and we will confirm what we can supply for your configuration.
Our 300mm work is a repair service, not a replacement-part range. We repair TEL OEM-supplied 300mm ESCs, and those repairs have been qualified at major production wafer fabs for years. The process is incoming inspection, a detailed repair flow, then a rigorous final test. Every ESC is returned with a final test data sheet and a 90-day warranty.
Full detail of the process and the repair levels is on the 300mm ESC repairs page.
The Tokyo Electron numbers on these parts use forms such as 1885 and 1D85, and some carry an ES prefix. As with any OEM, the number identifies a revision as well as a part, and numbers are revised over the life of a platform. One physical ESC can therefore appear under more than one number.
Each product page lists every number we hold for that part, so a legacy number and a current number both lead to the same equivalent. Check the wafer size before you order. The 200mm and 150mm builds of a platform are different parts and are not interchangeable.
Every ESC we build is designed to be repaired rather than scrapped. There are two routes.
An ESC can typically be returned to original specification up to three times. CP (Ceramic Plate) builds are Level 2 only, because the repair route on those parts is to remove the whole ceramic plate and reattach it.
A large installed base of TEL etch and deposition tools is still in production on 150mm and 200mm lines. Those tools run power devices, analogue parts, MEMS, sensors and compound semiconductors. They are productive, but they are mature, and spares for mature platforms get slower and more expensive over time.
A direct equivalent fits the existing cathode, so nothing in the chamber changes and the recipe does not change. The same part can then be reconditioned repeatedly instead of replaced, which is where most of the lifetime saving comes from. For 300mm the same logic applies through repair rather than replacement.
We build direct-equivalent ESCs for other OEM platforms as well: AMAT ESC replacements, LAM ESC replacements, SPTS ESC replacements.
No. The replacement ESCs are direct equivalents designed and built independently by ESC Technology to fit and function in place of the original. ESC Technology is not affiliated with, authorised by, or endorsed by Tokyo Electron Limited.
TE8500 in 200mm and 150mm, SCCM in 200mm, UNITY in 150mm and DRM in 200mm. We also repair TEL OEM-supplied 300mm ESCs as a separate service.
Yes. Our 300mm work is repair rather than replacement. We repair TEL OEM-supplied 300mm ESCs, with incoming inspection, a detailed repair flow and a rigorous final test. Each ESC is returned with a final test data sheet and a 90-day warranty.
Some builds are supplied to qualified customers only, so we do not publish a number against them. Contact us with the platform and wafer size and we will confirm what we can supply for your configuration.
Yes. Level 1 is a surface recondition at indicatively around 25% of the price of a new ESC. Level 2 is a full strip and rebuild to the frame at around 70%. An ESC can typically be returned to specification up to three times. CP (Ceramic Plate) builds are Level 2 only.
Send us the OEM part number, the wafer size and the platform. We will confirm the correct TEL equivalent, or quote the repair, for your chamber configuration.
ESC Technology is an independent supplier and is not affiliated with, authorised by, or endorsed by Tokyo Electron Limited. All replacement products described on this page are direct equivalents only. They are not OEM parts. Repair percentages are indicative and are quoted per ESC after inspection.
