PRODUCTS

SPTS

ESCT provides the following new products for SPTS chambers;

They replace the old OEM ESC designs including;

RIE
Synapse/APC
ESCT
OLD
RIE
Synapse/APC

ESCT
OLD
RIE
Synapse/APC
RIE
Synapse/APC

Each ESC is available in multiple wafer sizes, and delivers

  • Improved Performance
  • Reduced Cost of Ownership

 

Please check here to see which original OEM part numbers have been replaced.
 

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