We offer standard ESC products to go into your OEM chamber. These save time and money for the wafer fabs, and a much better supply chain.
The ESC’s are designed to use the existing OEM hardware (power supply, cathodem process kit etc). In most cases ( Coulombic – > Coulombic) the same recipe can be used, and in other cases ( JR – > Couloombic), new settings are required.
In all cases where a requalification is required, we will support you with evaluation.
Contact us for a quotation and please send your current ESC OEM information.
Please look at our current range of products, and contact us with any questions.
