- Tests have been completed in our labs to investigate how a SiC wafer performs compared to a standard Si wafer on our MxP+ ESC.
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Keeping the chucking voltage steady at 1.6KV, we ramped up the backside helium pressure and compared the leakrates. Some data shared here.
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With more variety of wafers (GaN, SiC, Sapphire etc) and wafer sizes, we can design and test ESC’s for your applications.
Get in touch if you are interested to learn more.
