Advanced ESC Materials

Advanced ESC Materials

Changing process developments in the wafer fab make it necessary to continually develop improved ESC materials used;

• High Dielectric Constant with High Breakdown Voltages

• Matched Thermal Rates of Expansion

• Recycling of ESC’s, reusable designs

• Reliable chucking and dechucking

Our ESC’s use the latest proprietary and commercially available materials, to meet and exceed customer process requirements;

• Single Piece Spray Coated Al2O3

• Super Dense Al2O3 Ceramic Plate

• Al6061 and Al+ “MMC”