The latest developments in 300mm. ESC are now becoming available for 200mm and 150mm, in the expanded products from ESCT.
Using a proprietary patented process at TEMNEST, the latest Alumina material offers even higher dielectric constant performance. With the highest possible material density, the new Super-Dense ESC’s are almost transparent on the wafer side.
This delivers the best performance for breakdown voltage and extends ESC lifetime to new record highs for RF hours. Of course, ESCT and TEMNEST offer repair and recycling of each ESC to new condition.
Compared to other similar materials used by some OEM’s on 300mm, our material is very favourable for breakdown voltage and density.
TEMNEST and ESCT will now use this advanced technology to redesign some equivalent ESC’s for 200/150mm on AMAT, Lam, TEL and SPTS chambers to offer an alternative to standard Al2O3.
