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TE8500 ESC for 150mm (6-inch) Wafer Processing
The TE8500 ESC in its 150mm configuration is a direct equivalent for the Tokyo Electron TE8500 etch chamber, engineered by ESC Technology to clamp and temperature-control 6-inch wafers during plasma etch. It mounts on the same cathode, power supply and gas connections as the original — a true drop-in with no chamber modification — and, unlike the OEM part, it is fully repairable.
Why a 150mm TE8500?
Built specifically for the TE8500 platform in 150mm, this equivalent delivers consistent electrostatic clamping and helium-cooled temperature control so 6-inch etches stay uniform run to run. Because it is a maintainable part rather than a consumable replacement, it simplifies spares planning for fabs still running 6-inch TE8500 lines the OEM no longer prioritises.
Design & Compatibility
The ESC clamps the wafer electrostatically via DC bias and cools the backside with helium across a mesa field and seal band sized for the 6-inch wafer, holding tight temperature uniformity through the process. Mechanically and electrically it matches the original, so it installs on the existing cathode with no requalification of the wider tool. Construction options (coated-ceramic and CP / Ceramic Plate) follow the ESC Technology family standard — the denser CP giving higher breakdown voltage and improved thermal control.
Repair & Reconditioning
Coated-ceramic ESCs support Level 1 surface reconditioning and Level 2 strip-and-rebuild, and can typically be returned to original specification up to three times. CP variants are Level 2 only. Compare L1 and L2 repair in detail.
Lower Cost of Ownership
Because the same ESC can be reconditioned repeatedly rather than scrapped, the 150mm TE8500 equivalent materially lowers lifetime cost versus buying new OEM parts each cycle. ESC Technology supplies and services these ESCs across North America, Europe, South-East Asia and Japan.
OEM Cross-Reference (150mm)
This 150mm TE8500 is a direct equivalent for the Tokyo Electron TE8500 etch chamber. It is a direct equivalent, not an OEM part, and is not affiliated with Tokyo Electron. Where a published OEM part number applies, it can be confirmed on request against your existing chamber configuration.
Frequently Asked Questions
Is the 150mm TE8500 ESC an original Tokyo Electron part?
No. It is a direct equivalent manufactured independently by ESC Technology to fit and function identically to the Tokyo Electron TE8500 ESC. It is not an OEM part and is not affiliated with Tokyo Electron.
Will it fit my TE8500 chamber without modification?
Yes. The 150mm ESC mounts on the same cathode, power supply and helium/gas connections as the original, so it is a drop-in replacement with no chamber modification or requalification of the surrounding hardware.
Can the ESC be repaired instead of replaced?
Yes. Coated-ceramic ESCs support a Level 1 surface recondition (indicatively ~25% of a new ESC) and a Level 2 full strip-and-rebuild to frame (~70%), and can typically be returned to original specification up to three times. CP (Ceramic Plate) variants are Level 2 only.
Which OEM part number does the 150mm TE8500 replace?
The 150mm TE8500 is supplied as a direct equivalent for the Tokyo Electron TE8500 etch chamber. Where a published OEM number applies to your configuration, our team can confirm the correct equivalent on request.
What wafer size and applications does it suit?
It is built for 6-inch (150mm) wafers on TE8500 plasma-etch processes, typical of mature-node power, analog, MEMS, sensor and RF production.